JPS6141232Y2 - - Google Patents
Info
- Publication number
- JPS6141232Y2 JPS6141232Y2 JP4574982U JP4574982U JPS6141232Y2 JP S6141232 Y2 JPS6141232 Y2 JP S6141232Y2 JP 4574982 U JP4574982 U JP 4574982U JP 4574982 U JP4574982 U JP 4574982U JP S6141232 Y2 JPS6141232 Y2 JP S6141232Y2
- Authority
- JP
- Japan
- Prior art keywords
- probe
- needle
- needles
- integrated circuit
- card
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000523 sample Substances 0.000 claims description 65
- 239000004065 semiconductor Substances 0.000 claims description 5
- 238000005259 measurement Methods 0.000 description 6
- 238000012360 testing method Methods 0.000 description 3
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 231100000241 scar Toxicity 0.000 description 1
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
- Measuring Leads Or Probes (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4574982U JPS58148933U (ja) | 1982-03-31 | 1982-03-31 | 集積回路測定装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4574982U JPS58148933U (ja) | 1982-03-31 | 1982-03-31 | 集積回路測定装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58148933U JPS58148933U (ja) | 1983-10-06 |
| JPS6141232Y2 true JPS6141232Y2 (en]) | 1986-11-25 |
Family
ID=30056759
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4574982U Granted JPS58148933U (ja) | 1982-03-31 | 1982-03-31 | 集積回路測定装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58148933U (en]) |
-
1982
- 1982-03-31 JP JP4574982U patent/JPS58148933U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS58148933U (ja) | 1983-10-06 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US4780670A (en) | Active probe card for high resolution/low noise wafer level testing | |
| JP3616236B2 (ja) | プローブカードおよびそれを用いたウエハテスト方法 | |
| JPH04240570A (ja) | マイクロ・プローブ・ボード | |
| JP2003107105A (ja) | プローブカード | |
| JPS55133549A (en) | Probe card | |
| JP3586106B2 (ja) | Ｉｃ試験装置用プローブカード | |
| JPH07193106A (ja) | バーンインテスト用チップのホールディング装置及びその製造方法 | |
| JPS6141232Y2 (en]) | ||
| JPS612338A (ja) | 検査装置 | |
| JP2576233Y2 (ja) | Ｉｃ試験装置のテストヘッドと試料との接続機構 | |
| JP3249865B2 (ja) | 半導体集積回路装置の製造方法 | |
| JPH01276735A (ja) | 集積回路素子ウエハ | |
| JP3204102B2 (ja) | コンタクトプローブ | |
| JP3048842U (ja) | プロービングカード | |
| JP2816695B2 (ja) | 固定プローブボード | |
| JP3052874B2 (ja) | Ｂｇａ型半導体装置のプローブ装置 | |
| JPS59208469A (ja) | プロ−ブカ−ド | |
| JPS63262849A (ja) | プロ−ブカ−ド | |
| JPS6325573A (ja) | 集積回路のテストボ−ド | |
| JPS5826530Y2 (ja) | プロ−ブカ−ド | |
| JPH0661316A (ja) | プローブ集合体 | |
| JPS6329538A (ja) | プロ−ブ装置 | |
| JPH02242165A (ja) | プローブユニット | |
| JP2003294808A (ja) | Ｂｇａタイプｉｃの測定用位置決め機能付ｉｃソケット | |
| CN114624568A (zh) | 失效分析装置 |